29. Han-Su Kim ECZ, Ya-Hong X: Effective method for stress reduction in thick porous silicon films. Appl Phys Lett 2002, 80:2287–2289.CrossRef 30. Steiner Vadimezan clinical trial P, Lang W: Micromachining applications of porous silicon. Thin Solid Films 1995, 255:52–58.CrossRef 31. Meifang Lai GMS, Giacinta P, Shanti B, Adrian K: Multilayer porous silicon diffraction gratings operating in the infrared. Nanoscale Res Lett 2012, 7:7.CrossRef 32. Herino R, Bomchil G, Barla K, Bertrand C, Ginoux JL: Porosity and pore size distributions of porous silicon layers. J Electrochem Soc 1987, 134:1994–2000.CrossRef Competing Caspase Inhibitor VI clinical trial interests The authors declare that they
have no competing interests. Authors’ contributions XS carried out the experiments, undertook fabrication steps, measured the microbeams, contributed to the interpretation of the data and drafted the manuscript. AK contributed to the guidance of the fabrication process, measurement of microbeams, interpretation of the data and drafting of the manuscript. GP contributed to the guidance and input to fabrication process and manuscript. All authors read and
approved the final manuscript.”
“Background Porous silicon (pSi) is a well-established material for the tailor-made fabrication of optical biosensors and can be easily prepared by electrochemical etching. The simplicity of its fabrication buy Eltanexor process in combination with its intrinsic large surface area and convenient surface chemistry has considerably pushed this research field. The optical transduction in pSi sensors is based
on changes in the interference pattern which results from the reflection of light at the interfaces of the porous silicon film. To improve the sensitivity of pSi sensors, more sophisticated optical structures such as rugate filters, Bragg reflectors, and microcavities have been realized by modulating the porosities of the pSi using appropriate etching parameters. These structures possess peaks with narrow bandwidths in their reflectance spectra, and consequently, they are more sensitive in comparison to pSi monolayers showing Fabry-Pérot interference patterns [1, 2]. Another route to highly sensitive Amino acid optical pSi sensors is the introduction of a diffraction grating into the porous material [3–6]. Besides the tremendous progress in the optimization of the optical properties of pSi sensors, other challenges such as the stability of the pSi films in basic aqueous solutions and efficient surface functionalization have been heavily investigated [7]. A very promising and intriguing approach to further improve the performance of porous silicon sensors is the integration of polymers [8]. For this purpose, different strategies have been tested, including coating of the porous silicon layer with a polymer film [9], infiltration of polymer into the porous matrix [10, 11], and polymer microdroplet patterning of porous silicon structures [12].